Shimadzu Corporation will launch the company’s new “TMP-X2905/X3405” series of turbo molecular pumps with integrated power supplies and 3000 L/s class pumping speeds for semiconductor and flat panel ...

Three DARPA-funded research teams have completed a foundational study of chip-scale vacuum pumps by inventing three very different approaches to removing air from a sample chamber with a volume of one ...

MEMS and motor control are two things we cover and small vacuum pumps are often controlled by micros so it made sense to talk with Dr. Wei Yang about Honeywell’s latest technology breakthrough, a tiny ...

In principle, industrial vacuum pumps are merely compressors run with the inlet attached to the vacuum system and the outlet open to exhaust. In smaller sizes, compressors and vacuum pumps are often ...