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Abstract: This paper presents a high-quality single-crystal piezoelectric aluminum nitride (AlN) thin film grown on gallium nitride (GaN) transition layer on sapphire substrate. The Metal-organic ...
Process Control Laboratory, Department of Chemical and Food Engineering, Federal University of Santa Catarina - UFSC, University Center (Trindade), Florianópolis, 88040900 Santa Catarina, Brazil ...